Low-pressure process apparatus

ABSTRACT

A low-pressure process apparatus for processing a substrate comprises a base, a stage a housing and at least one first roller set. The stage is disposed on the base for supporting the substrate. The housing is detachably disposed on the base moving between a first position and a second position, wherein when the housing is in a first position, the housing and the base form a chamber to receive the stage. When the housing is detached, the first roller set contacts and supports the housing to facilitate movement thereof in a first horizontal direction.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The invention relates to a low-pressure process apparatus, and inparticular to a low-pressure process apparatus for drying photoresist.

2. Description of the Related Art

FIG. 1 a shows a conventional low-pressure process apparatus 10comprising a base 1, a housing 2, a stage 3, supporting elements 5,actuating devices 6 and an exhaust pipe 7. The stage 3 is disposed onthe base 1, supporting a substrate 4. The housing 2 and the base 1 forma chamber 8 receiving the stage 3 and the substrate 4. The exhaust pipe7 and the supporting elements 5 are disposed on the base 2. Theactuating devices 6 are disposed on the base 1. With reference to FIG. 1b, the actuating devices 6 push the supporting elements 5 and thehousing 2, and separate the housing 2 from the base 1 allowing a robot(not shown) to access the substrate 4.

When the low-pressure process apparatus 10 dries a photoresist material(for example, resin), volatile chemical or particles are deposited on aninner wall of the housing of the exhaust pipe 7. Thus, the housing 2 andthe exhaust pipe 7 require regular cleaning. Conventionally, the housing2 and the exhaust pipe 7 are manually cleaned after the housing iselevated. The cleaning process is difficult and time consuming.Additionally, when the housing 2 and the exhaust pipe 7 are cleaned, thelow-pressure process apparatus 10 is shut down affecting process yield.

BRIEF SUMMARY OF THE INVENTION

A detailed description is given in the following embodiments withreference to the accompanying drawings.

The invention provides low-pressure process apparatus for processing asubstrate, comprising a base, a stage, a housing and at least one firstroller set. The stage is disposed on the base, supporting the substrate.The housing is detachably disposed on the base and moves between a firstposition and a second position, wherein, when in a first position, thehousing and the base form a chamber to receive the stage. When thehousing is detached, the first roller set contacts and supports thehousing to allow movement in a first horizontal direction.

The housing of the invention is detached and removed from the base to becleaned. Thus, when the original housing (first housing) is cleaned,another housing (second housing) can be disposed on the base to continuethe low-pressure process. Shutdown time of the low-pressure processapparatus is thus shortened, and yield and cost are conserved.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention can be more fully understood by reading the subsequentdetailed description and examples with references made to theaccompanying drawings, wherein:

FIG. 1 a shows a conventional low-pressure process apparatus;

FIG. 1 b shows the conventional low-pressure process apparatus raising ahousing thereof;

FIG. 2 a is a front view of a low-pressure process apparatus of a firstembodiment of the invention;

FIG. 2 b is a front view of a low-pressure process apparatus of theinvention when a housing thereof is in a second position;

FIG. 2 c is a side view of a low-pressure process apparatus of theinvention when the housing is in the second position;

FIGS. 3 a and 3 b show first roller sets contacting lead grooves;

FIG. 3 c shows the housing sliding by the first roller sets and the leadgrooves;

FIG. 4 a shows substrate processing equipment of the invention;

FIG. 4 b shows the housing detached from the substrate processingequipment;

FIG. 5 shows raising devices of the invention;

FIG. 6 a shows a low-pressure process apparatus of a second embodimentof the invention;

FIG. 6 b shows a housing detached from the low-pressure processapparatus of the second embodiment.

DETAILED DESCRIPTION OF THE INVENTION

The following description is of the best-contemplated mode of carryingout the invention. This description is made for the purpose ofillustrating the general principles of the invention and should not betaken in a limiting sense. The scope of the invention is best determinedby reference to the appended claims.

FIG. 2 a is a front view of a low-pressure process apparatus 100 of afirst embodiment of the invention, comprising a base 111, a housing 120,lead grooves 140, first roller sets 150 and air cylinders (actuatingdevices) 160. A stage 112 is disposed on the base 111 supporting asubstrate 113. The housing 120 is disposed on the base 111, and forms achamber 114 with the base 111. The stage 112 and the substrate 113 arereceived in the chamber 114. An exhaust pipe 130 is disposed on thehousing 120 extending into the chamber 114 for exhausting air therefrom.The actuating devices 160 are disposed on the base 111. The first rollersets 150 are disposed on the actuating devices 160. The lead grooves aredisposed on two sides of the housing 114 corresponding to the firstroller sets 150.

With reference to FIG. 2 b, the housing 120 is moveable between a firstposition (as shown in FIG. 2 a) and a second position (as shown in FIG.2 b), wherein raising devices moving the housing 120 between the firstand second positions are not shown to simplify the description. When thehousing 120 is in the first position, the housing 120 and the base 111form the chamber 114 for low-pressure processing of the substrate 113.When the process is finished, the housing 120 is moved to the secondposition allowing a robot (not shown) to access the substrate 113.

FIG. 2 c is a side view of the low-pressure process apparatus 100 whenthe housing 120 is in the second position. Each first roller set 150comprises a supporting element 151 and a plurality of rollers 152. Therollers 152 are disposed on the supporting element 151. The supportingelement 151 contacts the actuating device 160.

With reference to FIGS. 3 a and 3 b, the housing 120 is detachablydisposed on the base 110. The user can remove the housing 120 from thebase 110 to clean the housing 120 individually. When the housing 120 isdetached from the base 110, the actuating devices 160 raise the firstroller sets 150 to a first plane to contact the lead grooves 140,wherein the first roller sets 150 support and move the housing 120. In amodified embodiment, the actuating devices 160 further raise the housing120 and the first roller sets 150 after the first roller sets 150contact the lead grooves 140. With reference to FIG. 3 c, after thefirst roller sets 150 are raised to the first plane and contact the leadgrooves 140, the housing 120 is moved to a transmission device 200 in afirst horizontal direction y. The transmission device 200 comprisessecond roller sets 210 located on the first plane. The housing 120 ismoved on the first roller sets 150 and the second roller sets 210 by thelead grooves 140.

FIG. 4 a shows the low-pressure process apparatus 100 of the inventiondisposed in substrate process equipment 300. The substrate processequipment 300 comprises a plurality of stockers 310, a cleaning unit(first process apparatus) 320, a photoresist coating apparatus (secondprocess apparatus) 330, low-pressure process apparatus 100, an exposureunit 340 and robots 350, wherein the cleaning unit (first processapparatus) 320, the photoresist coating apparatus (second processapparatus) 330, and the low-pressure process apparatus 100 are arrangedalong a second horizontal direction x. With reference to FIG. 4 b, whenthe housing 120 is detached, the housing 120 is moved to thetransmission device 200 in the first horizontal direction yperpendicular to the second horizontal direction x.

The housing 120 of the invention is detached and removed from the base111 to be cleaned. Thus, when the original housing (first housing) iscleaned, another housing (second housing) can be disposed on the base 11to continue the low-pressure process. Shutdown time of the low-pressureprocess apparatus is thus shortened, and yield and cost are conserved.

The low-pressure process apparatus 100 of the invention can be utilizeddrying organic solvents, such as photoresist (for example, resin).

With reference to FIG. 5, the housing 120 is moved between the firstposition and the second position by the raising devices 170 and thesupporting structures 122. Each raising device 170 comprises asupporting rod 171. The supporting structures 122 are disposed on thehousing 120. The supporting rods 171 are connected to the supportingstructures 122. The raising devices 170 raise the housing 120 by thesupporting rods 171. The supporting rods 171 abut the supportingstructures 122 for easy detachment.

FIG. 6 a shows a low-pressure process apparatus 100′ of a secondembodiment of the invention, wherein the housing 120′ comprises a gate121 disposed on a back side thereof. Thus, in the second embodiment,when the robot accesses the substrate 113, the housing 120′ is notraised. With reference to FIG. 6 b when the housing 120′ is detached tobe cleaned, the actuating devices 160 directly push the first rollersets 150 and the housing 120′. In the second embodiment of theinvention, there is no additional device to raise the housing 120′.

While the invention has been described by way of example and in terms ofpreferred embodiment, it is to be understood that the invention is notlimited thereto. To the contrary, it is intended to cover variousmodifications and similar arrangements (as would be apparent to thoseskilled in the art). Therefore, the scope of the appended claims shouldbe accorded the broadest interpretation so as to encompass all suchmodifications and similar arrangements.

1. A low-pressure process apparatus for processing a substrate,comprising: a base; a stage, disposed on the base supporting thesubstrate; a housing, detachably disposed on the base and moving betweena first position and a second position, wherein when the housing is in afirst position, the housing and the base form a chamber to receive thestage; and at least one first roller set, wherein when the housing isdetached, the first roller set contacts and supports the housing tofacilitate movement thereof in a first horizontal direction.
 2. Thelow-pressure process apparatus as claimed in claim 1, wherein thehousing comprises at least one lead groove disposed thereoncorresponding to the first roller set.
 3. The low-pressure processapparatus as claimed in claim 1, further comprising at least oneactuating device disposed on the base connecting the first roller set,wherein when the housing is in the second position, the actuating devicepushes the first roller set to a first plane to contact and support thehousing.
 4. The low-pressure process apparatus as claimed in claim 3,wherein the actuating device is an air cylinder.
 5. A method fordisassembling a low-pressure process apparatus, comprising: providing atransmission device and the low-pressure process apparatus as claimed inclaim 1; and moving the housing to the transmission device in the firsthorizontal direction via the first roller set.
 6. The method as claimedin claim 5, wherein the transmission device comprises at least onesecond roller set, and when the housing is horizontally moved, the firstand the second roller sets are located on a first plane.
 7. A substrateprocessing equipment, comprising: a first process apparatus; a secondprocess apparatus, and the low-pressure process apparatus as claimed inclaim 1, wherein the first process apparatus, the second processapparatus and the low-pressure process apparatus are arranged in asecond horizontal direction.
 8. The substrate processing equipment asclaimed in claim 7, wherein the first horizontal direction isperpendicular to the second horizontal direction.
 9. A low-pressureprocess apparatus for processing a substrate, comprising: a base; astage, disposed on the base supporting the substrate; a housing,detachably disposed on the base, wherein the housing and the base form achamber to receive the stage, and the housing comprises a gate disposedthereon; at least one actuating device; and at least one first rollerset connecting the actuating device, wherein when the housing isdetached, the actuating device pushes the first roller set and thehousing, and the housing contacts the first roller set to be moved in afirst horizontal direction via the first roller set.
 10. Thelow-pressure process apparatus as claimed in claim 9, wherein thehousing comprises at least one lead groove disposed thereoncorresponding to the first roller set.
 11. The low-pressure processapparatus as claimed in claim 9, wherein the actuating device is an aircylinder.
 12. A low-pressure process apparatus, comprising: a base,comprising two first roller sets disposed on two sides thereof; and ahousing, comprising an exhaust pipe wherein the housing is moveablebetween a first position and a second position above the base, and whenthe housing is in the first position, the housing and the base form achamber, wherein when the housing is in the second position, the firstroller sets contact and support the housing to facilitate movementthereof in a first horizontal direction away from the base.
 13. Thelow-pressure process apparatus as claimed in claim 12, wherein the basefurther comprises a stage.
 14. The low-pressure process apparatus asclaimed in claim 13, wherein the stage supports a substrate.
 15. Thelow-pressure process apparatus as claimed in claim 12, wherein thehousing comprises two lead grooves disposed on two sides thereofcorresponding to the first roller sets.
 16. The low-pressure processapparatus as claimed in claim 12, further comprising at least oneactuating device disposed on the base connecting to the first rollersets, wherein when the housing is in the second position, the actuatingdevice pushes the first roller sets to a first plane to contact andsupport the housing.
 17. The low-pressure process apparatus as claimedin claim 16, wherein the actuating device is an air cylinder.
 18. Amethod for disassembling a low-pressure process apparatus, comprising:providing a transmission device and the low-pressure process apparatusas claimed in claim 12; and moving the housing to the transmissiondevice in the first horizontal direction via the first roller sets. 19.The method as claimed in claim 18, wherein the transmission devicecomprises at least one second roller set, and when the housing ishorizontally moved, the first and the second roller sets are located ona first plane.
 20. A substrate processing equipment comprising: a firstprocess apparatus; a second process apparatus; and the low-pressureprocess apparatus as claimed in claim 12, wherein the first processapparatus, the second process apparatus and the low-pressure processapparatus are arranged in a second horizontal direction.
 21. Thesubstrate processing equipment as claimed in claim 20, wherein the firsthorizontal direction is perpendicular to the second horizontaldirection.